Description: UPIMOL® SA101 is an excellent heat-resistant polyimide shape, based on Biphenyl tetracarboxilic dianhydride(BPDA) originally developed by UBE. UPIMOL® SA101 has improved high durability for oxygen plasma, vacuum degassing properties, low water absorption and good processability. Heat distortion temperature is 470°C. Applications: - Semiconductor production equipment parts
- Vacuum equipment parts
- Precisely processed parts
- Heat and chemical resistant gaskets and sealing materials
Features: - Super high heat resistance (Heat distortion temperature: 470°C)
- Excellent plasma resistance
- Low out gas
- Good processability
- Very low impurities
- Low water absorption
Information provided by UBE. |