| High temperature protective coating for graphite. TaC, NbC, and ZrC coatings resist chemical attack by corrosive liquids and gases at very high temperatures. They are finding increasing acceptance in the sealing and protecting of graphite hardware from hot ammonia, hydrogen, hydrochloric acid, and molten metals used in compound semiconductor epitaxial processes such as MOCVD and LPE. These carbide coatings are uniform, impermeable, electrically conductive, and extremely wear resistant thus providing long life and low particle generation. Information provided by Momentive Performance Materials, formerly GE Advanced Ceramics. |
